Modeling and Simulation of 3D Structures for Gigabit DRAM
نویسندگان
چکیده
In this paper, we present a 3D topography simulator, socalled 3D-SURFILER(SURface proFILER), to model a complicated 3D structure on the substrate for gigabit DRAMs. The 3D-SURFILER comprises a deposition and etching simulator employing a cell advancing scheme and a parallel computational numerical engine. An MIM (MetalInsulator-Metal) stacked capacitor [1] has been chosen to verify the validity of the simulator.
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